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Matthias Schreiter, Mathias Link, Jan Weber
Application Potential of Integrated Thin Film Resonators in Liquid and Gaseous Media
Keywords: film bulk acoustic resonator (FBAR), gravimetric detection, bio-sensing, Gas Detection, viscosity
Integrated Film Bulk Acoustic Resonators (FBARs) are suitable for various sensor applications in gaseous and under certain circumstances also liquid surroundings. Analogously to the classic quartz crystal microbalance (QCM) a shift of the acoustic resonance frequency, e. g. due to a mass attachment is detected. The distinct advantage of FBARs is based on the feasibility of integrated arrays with numerous resonators which makes it suitable for complex measurement tasks, e. g. in medical applications. Besides the gravimetric detection it is also possible to detect mechanical stress and measure viscosities of the surrounding liquid. In this article results are presented and evaluated concerning investigations of the FBAR with respect to potential applications.
tm – Technisches Messen, Oldenbourg Wissenschaftsverlag
Print ISSN: 0171-8096
Volume: 75, 02/2008
Pages: 120 - 128