You are here: Home :: Area NEM :: Engineering :: Machine construction

Roland Füßl, Rainer Grünwald, Ingomar Schmidt

Analysis of the Measurement Uncertainties of Nanopositioning and Nanomeasuring Machines (NPM-Machines) by Means of a New Vectorial Model Approach

Keywords: nanometrology, uncertainty of nanopositioning and nanomeasuring machines, vectorial metrological model

Nanopositioning and Nanomeasuring Machines (NPM-Machines) are pieces of technological equipment that allow positioning, touching and measuring of centimeter-sized objects with nanometer precision. The specification of measurement results requires the expression of the uncertainty in measurement. The present paper describes a new modular concept for the expression of uncertainty budgets of NPM-Machines based on a vectorial metrological model.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 73, 09/2006
Pages: 465 - 471

Show full article (external site)

Show all available items of this journal

 

Area NEM