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H.W. Teichmann, D. Hiller, S.D. Westenhöfer, J.S. Pedersen, M.T. Gale

A Replicated Micro-Optical Sensor for Industrial Spectral Analysis

A new replicated miniature spectrometer module is presented which is made for industry-to-industrial use. The sensor concept, its fabrication technology, and the performance achieved are discussed in relation to industrial applications. The module is part of a PC-controlled spectral sensing system.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 68, 05/2001
Pages: 200

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