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Jan-Peter Hauschild, Eric Wapelhorst, Jörg Müller

A Portable MEMS-based Mass Spectrometer

Keywords: mass spectrometer, MEMS technology, environmental analysis, process control, field portable MS

Mass spectrometry is one of the most important techniques for the identification of chemical compounds. State-of-the-art mass spectrometers are common in laboratories, but they are rarely used in field applications due to their high price, big size, and complex handling. To make the mass spectrometry field-portable a fully integrated mass spectrometer in MEMS technology is presented. Due to its small size of 5 × 10mm² it can be operated at a pressure of 1Pa, so the pumping system can be simplified dramatically. Compared to conventionally assembled mass spectrometers, the cost of a chip mass spectrometer can be reduced by several orders of magnitude due to its potential for mass fabrication. Mass spectra measured with this device are presented.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 75, 02/2008
Pages: 129 - 134

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