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Wolfgang Osten, S. Seebacher, Th. Baumbach, Werner Jüptner

A Measurement System for the Determination of Material Properties of Microcomponents on the Basis of Digital Holography

This contribution describes a new measurement system based on digital holography which was developed to fulfill the special demands of the determination of material parameters of microsystem components. From a combined interferometrical shape and deformation analysis several parameters of interest like Poisson-ratio, Young′s modulus or the thermal expansion coefficients of micro-beams are derived.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 68, 02/2001
Pages: 80

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