In this paper a heating device is presented which allows to melt thin films very quickly and to keep at a predetermined temperature during a subsequent electron irradiation. The construction of the device and the techniques are presented; the regulation technology will be discussed and several test-results of melting-processes will be shown. A further emphasis are investigations of the influence of irradiation parameter on the regulation technology of the device during the electron irradiation.
Print ISSN: 0171-8096
Volume: 70, 06/2003
Pages: 323