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Zhi Li, Konrad Herrmann, Frank Pohlenz, Radovan Popadic

A Differential Interferometer with Confocal Position Sensor for the Measurement of Very Small Displacements of an Object with Narrow Curvature

This paper describes the development of a differential interferometer with new configuration for displacement measurements on strongly curved objects. A confocal position sensor was introduced into the setup of an existing differential interferometer with the aim to determine the relative position between the object and the reference beamsplitter. An experimental prototype has been built to calibrate the depth measuring system in a commercial nanoindentation instrument, which also clearly demonstrates the advantages of the differential interferometer developed.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 72, 10/2005
Pages: 549 - 555

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