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Ralf Seidel, Dietmar Müller

Torque in electrostatically driven micromirror devices

A characteristic feature of actuators by conversion of energy. In most cases electrical energy is converted to mechanical energy by a coupling field (magnetic, electrostatic or temperature field). This conversion is to generate large forces or displacements with as little loss as possible. The most important conversion principles are electrostatic, electrodynamic, electromagnetic, piezoelectric and thermal. In this article the calculation of an electrostatically induced driving torque in micromirror devices is presented.

it – Information Technology (vormals it+ti), Oldenbourg Wissenschaftsverlag

Print ISSN: 1611-2776
Volume: 41, 04/1999
Pages: 39

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