During the design phase of microsystems, the phy-si-cal behavior of the different componets and subsystems has to be examined in detail. A great variety of sophisticated tools is available on the market for the numerical analysis of these components. However, most of these tools do not fulfill the requirements of microsystem design, since the interaction between the different physical domains must be neglected in many cases. In this paper we describe an approach to investigate the interaction phenomena between the deformation of a flexible pump membrane and the fluid flow in the pump chamber by coupling of domainspecific simulation software. Emphasis is given to the mathematical description of the coupling process and the iteration scheme. Three wellknown iteration algorithms are investigated and compared with repect to their convergence stability.
Print ISSN: 1611-2776
Volume: 41, 04/1999
Pages: 7