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Rainer Brück

Models and Tools for Physical Microsystem Design

The design requirements for microsystems differ substantially from those known from microelectronics. This is due to the three dimensional nature of microsystems and the large variety of technologies used. This article first presents the circle model. Based on this model, tools to support layout design for micro structures have been implemented. As an example the LIDO system will be presented. It supports the configuration of process sequences and the automated checking of design rules. Furthermore the article addresses an aspect of integrating sets of specific design tools to complete design systems. The approach of technology oriented design frameworks that dominates microelectronics design does not appear appropriate in this context. Instead, flexible, problem-oriented configurable tools are called for. First approaches of Internet-based, distributed design tools realized as "Componentware" will be presented.

it – Information Technology (vormals it+ti), Oldenbourg Wissenschaftsverlag

Print ISSN: 1611-2776
Volume: 41, 04/1999
Pages: 20

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