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Ingo Sieber, G. Eggert, Winfried Jakob, Klaus-Peter Scherer

Design Optimization in Microsystems Technology Using Evolutionary Algorithms

Manufacturing test structures of microsensors and -actuators is very expensive in terms of time and materials. In conventional design process, this limits the number of design variants to be considered. For this reason, computer-supported design techniques are becoming more and more important in microsystems technologies.
A design optimization can be achieved by partial automated investigation of the parameter space of the systems parameters.

it – Information Technology (vormals it+ti), Oldenbourg Wissenschaftsverlag

Print ISSN: 1611-2776
Volume: 41, 04/1999
Pages: 27

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