You are here: Home :: Area NEM :: Chemistry :: Physical chemistry

K. Kobayashi

"Low Dielectric Constants of B₂O₃-SiO₂-Si₃N₄ Glasses and their Electronic Molar Polarizability"

Low polarizable B₂O₃-SiO₂-Si₃N₄ glass systems were investigated as regards the low dielectric constant and dielectric loss. The experimental data showed that the low dielectric constant ε and the molar polarizability α _m were equivalent, when using Clausius Mosotti´s equation. They showed the low dielectric constants ε 2.13 to 2.47 dielectric losses tan δ 0.002 to 0.006 at 1 GHz, molar polarizabilities α_m 39 × 10^-25 cm³ to 44 × 10^-25 cm³. Increasing the content of silicon nitrite decreased the values of ε and α_m and enhanced flow points T_f. These glasses have the potential to apply to the interlayer insulator of multilevel interconnection in ULSI (Ultra Large Scale Integration), which is compatible with aluminum interconnection.

Zeitschrift für Physikalische Chemie, Oldenbourg Wissenschaftsverlag

Print ISSN: 0942-9352
Volume: 208, 01/1999
Pages: 267

Journal homepage (external site)

Show all available items of this journal

 

Area NEM